EG Gas Series Filters
EG Gas filters are designed for the ultrapure gas systems in the gas line or purge port of the semiconductor process to remove particles from the air or inert gas.
Specifications
Housing: Electropolished SUS 316L
Membrane: Hydrophobic PTFE
Core: PFA
Removal Ratings: ≧0.003µm
Length: 73~120mm, depending on the connect type.
Connect: VCR or Swagelok
Membrane: Hydrophobic PTFE
Core: PFA
Removal Ratings: ≧0.003µm
Length: 73~120mm, depending on the connect type.
Connect: VCR or Swagelok
Application
N2 or air filtration.
