EGX Gas Series Filters
EGX Gas filters are designed for ultrapure gas systems in semiconductor equipment, where high flow capacity and compact installation are essential.
Specifications
Housing: Electropolished SUS 316L
Membrane: Hydrophobic PTFE
Core: PP
Removal Ratings: ≧0.003µm
Length: 141~148mm, depending on the connect type.
Connect: VCR or Swagelok
Membrane: Hydrophobic PTFE
Core: PP
Removal Ratings: ≧0.003µm
Length: 141~148mm, depending on the connect type.
Connect: VCR or Swagelok
Application
Suitable for installation in confined gas panels or cabinets to remove particles from process or purge gases.
