OEC Series Capsule Filters
The OEC filters are designed for extremely small volume photoresist filtration. It is designed for resist dispense systems which require the smallest footprint and low hold-up. The configuration of OEC filters is a quick disconnect designed for easily connect with manifold. This design provides a safe, quick and easy change-out.
Three filter media, PTFE, PES and PP, are available for different application demand.
Three filter media, PTFE, PES and PP, are available for different application demand.
Specifications
Medium: PP, PES or PTFE, depending on application
Core ,cage and endcaps : Polypropylene
Support layer: Polypropylene
Removal Ratings: 0.1, 0.2, 0.45, 1, 3, 5, 10µm
Length: 107mm
Core ,cage and endcaps : Polypropylene
Support layer: Polypropylene
Removal Ratings: 0.1, 0.2, 0.45, 1, 3, 5, 10µm
Length: 107mm
Benefits & Features
Capsule design enable minimal contamination.
Minimized hold-up volume.
Quick connect and seal designed with compatible manifold.
Reduces chemical waste during filter startup and change-out.
Hydrophilic PES membrane is an option for high flow rate with lower pressure. dropped. It can eliminate micro bubble generation in critical process.
PTFE membrane option for stronger chemicals.
Minimized hold-up volume.
Quick connect and seal designed with compatible manifold.
Reduces chemical waste during filter startup and change-out.
Hydrophilic PES membrane is an option for high flow rate with lower pressure. dropped. It can eliminate micro bubble generation in critical process.
PTFE membrane option for stronger chemicals.
Application
TFT-LCD Color Filter :Photo resists, coating chemicals.
Filtration of solvents.
Small volume point-of-use filtration.
Filtration of solvents.
Small volume point-of-use filtration.
