Filter regeneration Services
Through regeneration technology, used perfluoro filter elements are restored to their original factory specifications and reused.
This solution helps customers reduce operation costs and carbon emissions.
This solution helps customers reduce operation costs and carbon emissions.
Specifications
Pore size : 100 micron ~ 2 nanometers
Material : PTFE membrane and PFA
Length : 5", 10", 20"
Type : Filter cartridge or capsule type
Cleanliness (typical specifications for 10”):
Metallic extractables <3 ug/capsule type or <10 ug/cartridge type
Particle shedding ≧0.2um particles <1.5 particles/ml
TOC recovery <5 ppb/capsule type or <10 ppb/cartridge type
Resistivity recovery <0.5MΩ
The cleanliness can also follow customer’s current new product specifications.
Material : PTFE membrane and PFA
Length : 5", 10", 20"
Type : Filter cartridge or capsule type
Cleanliness (typical specifications for 10”):
Metallic extractables <3 ug/capsule type or <10 ug/cartridge type
Particle shedding ≧0.2um particles <1.5 particles/ml
TOC recovery <5 ppb/capsule type or <10 ppb/cartridge type
Resistivity recovery <0.5MΩ
The cleanliness can also follow customer’s current new product specifications.
Benefits & Features
Regenerative filter approaching new product specifications.
Complete COA to ensure the quality of regeneration.
Reduce usage cost and environment loading.
Complete COA to ensure the quality of regeneration.
Reduce usage cost and environment loading.
Application
Cartridge all fluoropolymer filter regeneration.
Disposable all fluoropolymer filter regeneration.
Ion exchange or purifier regen.
SC1, SC2, SPM, H3PO4 and other semiconductor process filtration.
Disposable all fluoropolymer filter regeneration.
Ion exchange or purifier regen.
SC1, SC2, SPM, H3PO4 and other semiconductor process filtration.
