TEREPURE CMP qualified by foundry customer

EPAM’s Terepure CMP filters are successfully qualified and implemented at a leading foundry fab in Taiwan.
Post date: February-05-2021

Terepure CMP filters are designed by EPAM R&D team and manufactured at EPAM Chunan plant. To make sure the filters’ quality can meet customer requirements in the semiconductor CMP process, EPAM invested more than $300K US dollars to set up instruments and production line for Terepure CMP.
The filters are designed to remove critical large particles, but keep working particles in the slurry. Gradient nanofibers are used to increase particle loading capacity, lower pressure drop, and achieve a longer lifespan of filters.